Lab Equipment


 

Coherent Verdi Visible 5W 532nm Laser

 
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Important Features:

  • Optical noise <0.02% RMS measured from 10 Hz to 1 GHz

  • Output power from 0.1 to 5 W

  • Produces coherent green light at 532nm

Applications:

  • Holography

  • Interferometry

  • Light manipulation


 

Optical Profilometer (Zygo NewView 6000)

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Important Features: 

  • Uses scanning white light interferometry to image and measure the micro structure and topography of surfaces in three dimensions

  • Vertical z-scan measurement range from 0.1 nm to 15000 µm

  • Optical microscope lateral resolution > 0.45 µm to 11.8 µm

  • Data scan rate of up to 85 µm/sec with 0.1 nm height resolution

  • Step height accuracies of better than 0.75%

  • Scan and display areas up to 150 mm x 150 mm

Applications:

  • For non-contact surface structure and thin film thickness measurements

  • Images and measurements of surface morphology 


Laurell Spincoater (WS-650MZ-23NPP/LITE)

 
 
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Important features:

  • Fully programmable with multi-step process capability

  • Accommodates up to 150mm wafers and 5” by 5” substrates

  • Rotation speeds up to 12,000rpm

  • Includes 4 programmable syringes for dispensing fluids 

Applications:

  • Deposition of thin films

  • Coating

NuArc 26-1K Mercury Exposure System

 
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Important features:

  • 300 W broadband UV power output

  • Vacuum frame

Applications:

  • Lithography

  • UV curing